A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk
..
  • Silicon etch low roughness (Chilcott, Dan - GS)
  • SiO2 RIE etching without carbonizing the photoresist (weiquan yang)
  • 50 nm resist (Michael Cooke)
  • SiO2 RIE etching without carbonizing the photoresist (Bob Henderson)
  • Silicon etch low roughness (Wendell McCulley)
  • SiO2 RIE etching without carbonizing the photoresist (Brad Cantos)
  • patterning sub-micron holes in chromium (Marc Reinig)
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Process Variations in Microsystems Manufacturing
Addison Engineering
Nano-Master, Inc.
MEMStaff Inc.