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  • Lift-off Oxide on Silicon with PMMA mask? (Jie Zou)
  • lithography fin etch to define silicon NW (Yingnan Wang)
  • High Resolution Printer for Soft Lithography (DEBASHIS MAJI)
  • DRIE with AZP4620 as mask (Yingnan Wang)
  • DRIE with SF6 and CHF3 (Marcel Spurny)
  • DRIE with SF6 and CHF3 ([email protected])
  • lithography fin etch to define silicon NW (Bill Moffat)
  • DRIE with SF6 and CHF3 (Marcel Spurny)
  • Surface states between GaAs and SiO2 (mikas remeika)
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