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  • Microfludic probing station (DEBASHIS MAJI)
  • Etching of SiN (kapil kumar jain)
  • Refractive Index of Photoresist (Fei Wang)
  • PDMS stuck to hard mask (righeira carnegie)
  • Etching of SiN (antwi nimo)
  • Etching of SiN (Mark West)
  • Etching BST (Tony Price)
  • Etching of SiN (Benjamin Gesemann)
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Process Variations in Microsystems Manufacturing
Tanner EDA by Mentor Graphics