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  • MEMS surface stick problem in ANSYS contact analysis (Youmin Wang)
  • Alignment problem with Multilayer SU-8 fabrication ([email protected])
  • Best recipe to etch sio2 using CHF3 gas with ULVAC NE-550 (Ryan)
  • Best recipe to etch sio2 using CHF3 gas with ULVAC NE-550 (Martin,Michael David)
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