Springer Nature Publishing Releases New Book on MEMS Manufacturing Authored by Dr. Michael Huff, Founder and Director of the MEMS and Nanotechnology Exchange (MNX) at Corporation for National Research Initiatives.

The volume is entitled: Process Variations in Microsystems Manufacturing and covers how to estimate and manage the dimensional and material property variations resulting from the use of micro- and nano-fabrication techniques when designing and developing a microsystems device for production. This book is a valuable resource for practitioners, researchers and engineers working in the field as well as students at either the undergraduate or graduate level.

This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps. The book places an emphasis on the process variations in the device dimensions resulting from these commonly used processing steps. This will be followed by coverage of commonly used metrology methods, process integration and variations in material properties, device parameter variations, quality assurance and control methods, and design methods for handling process variations. A detailed analysis of future methods for improved microsystems manufacturing is also included. This book is a valuable resource for practitioners, researchers and engineers working in the field as well as students at either the undergraduate or graduate level.

Examines and explains the basic processing steps used in MEMS fabrication; Illustrates best practices and lessons learned in manufacturing of microsystems for commercial products with detailed case studies; Reviews future methods that may provide for improved process variations.