Mr. Gutierrez,
I am very interested in obtaining the vertical profile of MEMS
devices within reasonable resolution. In the past we hae used
a WYKO but there are limitations to this.
Can you describe more the capabilities of your system ? Do you
have any literature on the subject ?
A low cost vertical profiler is an essential need for MEMS
fabrication. The main problem with the WYKO is its cost
(About $100K)
We have also tried an AFM. The most suitable is made by digital
instruments with a 200x200um scan area with steps of up to
9 um. However it also cost $120K.
-C. H. Mastrangelo
-University of Michigan
On Wed, 18 Nov 1998, Adolfo Gutierrez wrote:
> Dear Colleagues,
>
> We are looking for researchers interested in establishing joint
> collaborations to perform characterization of MEMS devices using our system
> MEMSPEC -2000. W ecan perform measurements with vertical resolutions
> better than 0.1 um, lateral better than 1.0 um and motion analysis up to
> 100 kHz. Please visit our web site at http://www.intersci.com/memspec
>
> The goal of the collaboration is to perform measurements of prototype
> devices leading to publications or proposal submissions. Refer your
> questions to my attention at the adress below.
>
> Adolfo
>
>
>
> + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + +
> + Adolfo Gutierrez (518) 283 7500
> + Senior Scientist (518) 283 7502 fax
> + Director - Business Development
> + InterScience, Inc e-mail1: [email protected]
> + 105 Jordan Rd. e-mail2: [email protected]
> + Troy, NY 12180 http://www.intersci.com
> +
> + USA Dometic Beeper & Voice Mail: (800) 759 8888 PIN 2127477
> + International Beeper & Voice Mail: (601) 960 9548 PIN 2127477
> + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + +
>
>
>
>
