You should be able to, It's only a 10:1 aspect ratio.
-Mike
_______________
Mike Bigelow
Technical Sales
DRC - Metrigraphics
60 Concord Street
Wilmington, MA 01887 USA
Tel: + (978) 658-6100 ext. 3063
Fax: + (978) 657-7765
-----Original Message-----
From: BURRI Mathieu [mailto:[email protected]]
Sent: Friday, April 05, 2002 9:04 AM
To: [email protected]
Subject: [mems-talk] SU-8 small holes
Hello,
I have a question about SU-8 photoresist. Can you tell me if someone think
it's possible to define holes of 3-5 um diameter in SU-8 of 50-75 um thick?
If yes, is it possible to have your receipt?
Thank you for your help
Best regards
Mathieu Burri
SAMLAB Group
Institute of Microtechnology
University of Neuchbtel
Rue Jacquet Droz 1
CH-2000 Neuchbtel
Switzerland
+41 32 720 52 78
[email protected]
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