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  • Plasma etching of parylene (Keith Aubin)
  • Plasma etching of parylene (Jauniskis, Linas)
  • Surface Planarization (Brubaker Chad)
  • Preformed SU8 film ([email protected])
  • ICP-RIE coil frequency (William Lanford-Crick)
  • Oxidize Silicon ([email protected])
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