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Material for capping a SU8-2050 Microfluidic Opto-BioChip (Oakes Garrett)
looking for references; DRIE uniformity vs residual stress (manish Hooda)
Material for capping a SU8-2050 Microfluidic Opto-BioChip (eowin rohan)
Gold evaporation coating on silicon - thermal treatment for adhesion (Suraj Patil)
Solvent effects on Teflon AF (Brubaker Chad)
Gold evaporation coating on silicon - thermal treatmentfor adhesion (Brubaker Chad)
Metal plating onto SU-8 after hard bake (Michael Larsson)
MEMS encapsulation requirements (Bob Henderson)
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