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  • AFM scratch photoresist for nanograting (刘畅)
  • AFM scratch photoresist for nanograting (Roger Shile)
  • Integrating a thick dielectric layer surrounding suspended silicon nitride membranes (Ken Healy)
  • Integrating a thick dielectric layer surrounding suspended silicon nitride membranes (Roger Shile)
  • Integrating a thick dielectric layer surrounding suspended silicon nitride membranes (Paul Sunal)
  • Photolithography on Mica and Teflon sheets (madhav rao)
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