A monolithic lab-on-a-chip fabricated by femtosecond laser micromachining capable of label-free biosensing is reported. The device is entirely made of fused silica, and consists of a microdisk resonator integrated inside a microfluidic channel.
Predicting MEMS performance and the impact of process changes with the help of simulation. Micro-Electrical-Mechanical Systems (MEMS) based inertial sensors are used measure acceleration and rotation rate.
Taiwan-based Oriental System Technology (OST) is expected to scale up its shipments of infrared (IR) MEMS sensors for gaming notebooks to 4.5 million units in 2021 from 2.8 million in 2020.
Fig. 3: Laser system configuration and micromachining pattern of fs-LLO for GaN nanoLEDs. Fig. 4: GaN nanoLEDs in the entire process chain of the wafer-scale fs-LLO transfer route starting from their top–down patterning to hybrid integration onto a Cu foil.
